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KMID : 1059519900340060555
Journal of the Korean Chemical Society
1990 Volume.34 No. 6 p.555 ~ p.560
Fabrication of YBaCuO Superconducting Films by Aerosol Spray
Song Myung-Ah

Youn Min-Young
Kim Yun-Soo
Abstract
High temperature superconducting films of YBa2Cu3O7-x were fabricated on the (100) single crystal faces of YSZ (yttria stabilized zirconia) and SrTiO3 by aerosol spray using ultrasonic atomization. The superconducting phase was formed by a three-step process: (a) spraying of a stoichiometric solution of nitrates of yttrium, barium, and copper on heated substrates kept at 250¡É, (b) preheating of the sprayed films in air at 550¡É, and (e) sintering of the films in flowing oxygen at 950¡É, followed by furnace cooling. Resistances of the films were measured by the dc four-probe method and superconductivity was confirmed above the liquid nitrogen temperature.
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